Piezoelectric cantilever array for multiprobe scanning force microscopy

This paper attempts to describe a newly conceived multiprobe scanning force microscope (SFM) using a microfabricated piezoelectric cantilever. An array of piezoelectric microcantilevers with a piezoelectric ZnO layer on a SiO₂ film makes it possible to build the multiprobe SFM system. The piezoelectric cantilever is suitable for each cantilever of the array in the multiprobe SFM, because it can be utilized for both dynamic force sensing and controlling the tip-sample spacing. We have verified die applicability of the piezoelectric cantilever to each cantilever of the multiprobe array by characterizing tile sensitivities of the deflection sensing and actuation in z-direction. The 125-μm-long cantilever could be statically driven by applying dc voltages to the piezoelectric layer, where the sensitivity of static drive was 20 nm/V. We have also fabricated an experimental piezoelectric microcantilever arrays with ten cantilevers. The mechanical resonance property of the cantilevers of the array has been studied