Micromachined silicon fuel atomizers for gas turbine engines

Author

Singh, Angad ; Mehregany, Mehran ; Phillips, Stephen M. ; Harvey, Rex J. ; Benjamin, Michael

Author_Institution

Case Western Reserve Univ., Cleveland, OH, USA

fYear

1996

fDate

11-15 Feb 1996

Firstpage

473

Lastpage

478

Abstract

This paper presents results on fabrication and testing of micromachined fuel atomizers for gas turbine engines. Pressure-swirl (simplex) atomizers are batch fabricated by bulk micromachining of silicon using deep reactive-ion-etching (RIE). The atomizers are fabricated as an array, according to a designed experiment, and the influence of the geometric features on the performance of the atomizers is studied. The atomizer design is optimized by a response surface methodology. Finally, a comparative study is done, comparing and contrasting the performance of the silicon atomizers with conventional and metallic atomizers

Keywords

aerospace engines; arrays; batch processing (industrial); design of experiments; elemental semiconductors; fuel; gas turbines; micromachining; micromechanical devices; semiconductor technology; silicon; sprays; sputter etching; surface fitting; Si; array; batch fabrication; bulk micromachining; deep reactive-ion-etching; designed experiment; gas turbine engines; geometric features; micromachined fuel atomizers; pressure-swirl atomizers; response surface methodology; silicon atomizers; simplex atomizers; Design optimization; Engines; Etching; Fabrication; Fuels; Micromachining; Response surface methodology; Silicon; Surface fitting; Turbines;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on

Conference_Location

San Diego, CA

Print_ISBN

0-7803-2985-6

Type

conf

DOI

10.1109/MEMSYS.1996.494028

Filename

494028