Title :
The gas micropreconcentrators in LTCC and MEMS technologies for breath acetone analysis
Author :
Rydosz, Artur ; Maziarz, Wojciech ; Pisarkiewicz, Tadeusz ; Gruszczynski, Slawomir ; Wincza, Krzysztof
Author_Institution :
Dept. of Electron., AGH Univ. of Sci. & Technol., Krakow, Poland
Abstract :
The authors designed and manufactured the gas micropreconcentrators in two of the most popular industry technologies: low temperature cofired ceramic (LTCC) and microelectromechanical systems (MEMS). Both structures have similar lateral dimensions: 20 mm × 25 mm × 1.2 mm for micropreconcentrator in LTCC technology and 20 mm × 20 mm × 1.68 mm for micropreconcentrator in MEMS technology. Both structures contain a 120 mm long channel filled with adsorbent material. The authors used commercially available adsorbents supplied by Sigma-Aldrich. In the paper the authors describe thermal measurements, power consumption and concentration factor tests of manufactured structures for gaseous acetone.
Keywords :
ceramic packaging; microfabrication; micromechanical devices; LTCC technologies; MEMS technologies; Sigma-Aldrich; breath acetone analysis; concentration factor tests; gas micropreconcentrators; gaseous acetone; low temperature cofired ceramic; microelectromechanical systems; power consumption; thermal measurements; Adsorption; Materials; Micromechanical devices; Power demand; Sensors; Temperature distribution; Temperature measurement;
Conference_Titel :
Electrical Design of Advanced Packaging and Systems Symposium (EDAPS), 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4673-1444-2
Electronic_ISBN :
978-1-4673-1445-9
DOI :
10.1109/EDAPS.2012.6469380
