Title :
Modelling and Simulation of a Pneumatically Actuated Micropump
Author :
Nedelcu, Oana Tatiana ; Morelle, Jean-Luc ; Tibeica, Catalin ; Voccia, Samuel ; Codreanu, Irina ; Dahms, Severin
Author_Institution :
Nat. Inst. for R&D in Microtechnol. (IMT-Bucharest), Bucharest
fDate :
Oct. 15 2007-Sept. 17 2007
Abstract :
Performances of a pneumatically actuated micropump are described. Simulation results combined to an analytical model are used to optimize the micropump design in order to obtain a working frequency of 10 Hz for pneumatic pressure varying between 0.1-6 bar. A pneumatic chamber is placed between a polymer membrane to be actuated, and microchannels connected to a vacuum system. Time for pressurizing cycle and vacuum cycle as function of design parameters and relative pressure are calculated.
Keywords :
micropumps; pneumatic control equipment; design parameters; frequency 10 Hz; microchannels; pneumatic chambers; pneumatically actuated micropump; polymer membranes; pressurizing cycle; relative pressure; vacuum cycle; Analytical models; Biomembranes; Computational modeling; Geometry; Instruments; Microchannel; Microfluidics; Micropumps; Solid modeling; Valves; microfluidic; modelling; pneumatic micropump; simulation;
Conference_Titel :
Semiconductor Conference, 2007. CAS 2007. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-0847-4
DOI :
10.1109/SMICND.2007.4519650
