Title :
Reliability of MEMS-based mass-flow controllers for semiconductor processing
Author :
Lawrence, Elizabeth D. ; Henning, Albert K.
Author_Institution :
Redwood Microsystems, Inc, Menlo Park, CA, USA
fDate :
30 March-4 April 2003
Abstract :
Microfabricated components are finding increasing application in semiconductor processing. In this work, we report the results of detailed reliability and MTTF studies on mass-flow controllers (MFCs) created from silicon pressure sensors, microfabricated orifices for use in the flow sensor, and microvalves. Attributes studied include accuracy, response time, inboard leak rate, and particle generation, all monitored versus number of cycles. From these measurements, MTTF is calculated to be greater than 3M cycles. Failure modes are also discussed in detail.
Keywords :
failure analysis; flow control; integrated circuit technology; microsensors; microvalves; pressure sensors; process control; seals (stoppers); semiconductor device reliability; MEMS-based mass-flow controllers; MTTF; accuracy; failure modes; flow sensor; inboard leak rate; microfabricated components; microfabricated orifices; microvalves; particle generation; reliability; response time; semiconductor processing; silicon pressure sensors; Linearity; Microvalves; Orifices; Process control; Protocols; Semiconductor device reliability; Sensor phenomena and characterization; Silicon; Temperature sensors; Testing;
Conference_Titel :
Reliability Physics Symposium Proceedings, 2003. 41st Annual. 2003 IEEE International
Print_ISBN :
0-7803-7649-8
DOI :
10.1109/RELPHY.2003.1197795
