DocumentCode :
3438599
Title :
Effects of periodically missing fingers and periodically shifted fingers on SAW propagation in quartz resonators
Author :
Yong, Yook-Kong ; Garon, Ronald ; Kanna, Shigeo ; Hashimoto, Ken-Ya
Author_Institution :
Dept. of Civil & Environ. Eng., Rutgers Univ., NJ, USA
fYear :
1998
fDate :
27-29 May 1998
Firstpage :
461
Lastpage :
469
Abstract :
A finite element study of a 3-electrode finger periodic SAW structure of ST-cut quartz was studied. This multi-period analysis allows more interaction of the bulk acoustic wave modes with the surface acoustic wave modes. Plane strain assumptions were used to enable a two-dimensional analysis of straight crested acoustic waves in the structure. Adaptive finite element meshes were employed to reduce the size of the finite element problem. The results of this study may be useful for a full-scale finite element modeling of SAW resonators and filters. The effects of periodically missing or shifted fingers may be useful for generating/controlling leaky SAW. The physical difference between the modes shapes of the two fundamental SAW modes were compared and contrasted. The numerical results of frequency spectrum versus electrode geometry and electrode height, respectively, confirms empirical experience with these SAW modes. Possible couplings of the SAW modes with the BAW modes are shown. These couplings lead to SAW modes with some BAW mode characteristics. The couplings may be useful for improving frequency temperature behavior or generation of leaky SAW modes. On the other hand, they may lead to poor frequency temperature behavior or low Q devices
Keywords :
finite element analysis; interdigital transducers; surface acoustic wave resonator filters; surface acoustic wave resonators; surface acoustic wave transducers; 3-electrode finger periodic SAW structure; BAW modes interaction; IDT; SAW filters; SAW propagation; SAW resonators; ST-cut quartz; SiO2; adaptive finite element meshes; electrode geometry; electrode height; finite element study; frequency spectrum; full-scale finite element modeling; leaky SAW; periodically missing fingers; periodically shifted fingers; plane strain assumptions; quartz resonators; straight crested acoustic waves; two-dimensional analysis; Acoustic waves; Capacitive sensors; Electrodes; Fingers; Finite element methods; Frequency; Periodic structures; Resonator filters; Surface acoustic waves; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Frequency Control Symposium, 1998. Proceedings of the 1998 IEEE International
Conference_Location :
Pasadena, CA
ISSN :
1075-6787
Print_ISBN :
0-7803-4373-5
Type :
conf
DOI :
10.1109/FREQ.1998.717938
Filename :
717938
Link To Document :
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