Title :
Chemically reduced lithium niobate single crystals: processing, properties and improvements in SAW device fabrication and performance
Author :
Standifer, E.M. ; Jundt, D.H. ; Norwood, R.G. ; Bordui, P.F.
Author_Institution :
Crystal Technol. Inc., Palo Alto, CA, USA
Abstract :
Chemical reduction of lithium niobate yields crystals with enhanced electrical conductivity and optical absorption. The higher conductivity of such crystals makes them less susceptible to pyroelectric charging, which would otherwise present difficulties in SAW device fabrication and operation. The crystals´ increased near-ultraviolet light absorptivity allows improvements in photolithographic exposure, such as generating narrower and more precise lines
Keywords :
crystal growth; electrical conductivity; lithium compounds; photolithography; piezoelectric materials; pyroelectricity; reduction (chemical); surface acoustic wave devices; surface acoustic wave filters; surface charging; transparency; ultraviolet spectra; LiNbO3; SAW device fabrication; SAW device performance; chemical reduction; enhanced electrical conductivity; enhanced optical absorption; near-ultraviolet light absorptivity; photolithographic exposure; precise lines; processing; pyroelectric charging; single crystals; surface charges; transparency; Chemical processes; Conductivity; Crystals; Electromagnetic wave absorption; Lithium niobate; Optical filters; Pyroelectricity; Surface acoustic wave devices; Surface acoustic waves; Temperature dependence;
Conference_Titel :
Frequency Control Symposium, 1998. Proceedings of the 1998 IEEE International
Conference_Location :
Pasadena, CA
Print_ISBN :
0-7803-4373-5
DOI :
10.1109/FREQ.1998.717939
