Chemically reduced lithium niobate single crystals: processing, properties and improvements in SAW device fabrication and performance

Author

Standifer, E.M. ; Jundt, D.H. ; Norwood, R.G. ; Bordui, P.F.

Author_Institution

Crystal Technol. Inc., Palo Alto, CA, USA

fYear

1998

fDate

27-29 May 1998

Firstpage

470

Lastpage

472

Abstract

Chemical reduction of lithium niobate yields crystals with enhanced electrical conductivity and optical absorption. The higher conductivity of such crystals makes them less susceptible to pyroelectric charging, which would otherwise present difficulties in SAW device fabrication and operation. The crystals´ increased near-ultraviolet light absorptivity allows improvements in photolithographic exposure, such as generating narrower and more precise lines

Keywords

crystal growth; electrical conductivity; lithium compounds; photolithography; piezoelectric materials; pyroelectricity; reduction (chemical); surface acoustic wave devices; surface acoustic wave filters; surface charging; transparency; ultraviolet spectra; LiNbO₃; SAW device fabrication; SAW device performance; chemical reduction; enhanced electrical conductivity; enhanced optical absorption; near-ultraviolet light absorptivity; photolithographic exposure; precise lines; processing; pyroelectric charging; single crystals; surface charges; transparency; Chemical processes; Conductivity; Crystals; Electromagnetic wave absorption; Lithium niobate; Optical filters; Pyroelectricity; Surface acoustic wave devices; Surface acoustic waves; Temperature dependence;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium, 1998. Proceedings of the 1998 IEEE International

Conference_Location

Pasadena, CA

ISSN

1075-6787

Print_ISBN

0-7803-4373-5

Type

conf

DOI

10.1109/FREQ.1998.717939

Filename

717939