Title :
Reliability enhancement test of vertical voice-coil motor on wafer stage of lithography machine
Author :
Zhean Gong ; Zhisheng Zhang ; Longlong Zhang ; Ruiyao Yang ; Yu Liu ; Hong-Zhong Huang
Author_Institution :
Sch. of Mech., Electron., & Ind. Eng., Univ. of Electron. Sci. & Technol. of China, Chengdu, China
Abstract :
Voice-coil motor has a lot of advantages such as small volume and light weight, high speed, high acceleration and rapid response, hence it is used to drive wafer and reticle stages of lithography machine to accomplish precise motion. The influence of internal cooling on motor´s motion accuracy is directly related to the performance and reliability of lithography machine. This paper aims to provide a basis for reliability growth by design of reliability enhancement test for vertical voice-coil motor on wafer stage, with which the researchers can stimulate potential failure and expose design defects.
Keywords :
cooling; electric motors; failure analysis; lithography; machine tools; precision engineering; reliability; reticles; semiconductor technology; internal cooling; lithography machine performance; lithography machine reliability; potential failure stimulation; precise motion; reliability enhancement test design defects; reliability growth; reticle stages; vertical voice-coil motor motion accuracy; wafer stage; Acceleration; Coils; Semiconductor device reliability; Temperature measurement; Temperature sensors; Testing; lithography machine; reliability enhancement test; reliability growth; voice-coil motor; wafer stage;
Conference_Titel :
Quality, Reliability, Risk, Maintenance, and Safety Engineering (QR2MSE), 2013 International Conference on
Conference_Location :
Chengdu
Print_ISBN :
978-1-4799-1014-4
DOI :
10.1109/QR2MSE.2013.6625733
