ZnO Micro/Nano Structures by MOCVD and Vapour Transport Technique: Growth and Characterization

Author

Rusu, E. ; Burlacu, A. ; Ursaki, V. ; Stratan, G. ; Purica, M. ; Budianu, E. ; Monaico, E.

Author_Institution

Inst. of Appl. Phys., Acad. of Sci. of Moldova, Chisinau

Volume

2

fYear

2007

fDate

Oct. 15 2007-Sept. 17 2007

Firstpage

327

Lastpage

330

Abstract

ZnO micro/nano structures were grown by metalo-organic chemical vapour deposition (MOCVD) and chemical vapour transport and condensation deposition process on Si and glass substrates. Using MOCVD method were grown uniform layers consisting of ZnO nanorods, or multilayer structures composed of nanorods and microrods arrays by the variation of the Ar carrier gas flow rate. A variety of hierarchical ZnO structures were grown on a textured ZnO layer using chemical vapour transport and condensation deposition process. Morphology, structural and optical properties of the obtained ZnO nanostructures are studied by means of scanning electron microscopy (SEM), X-ray diffraction (XRD) analysis and photoluminescence (PL).

Keywords

II-VI semiconductors; MOCVD; X-ray diffraction; condensation; multilayers; nanostructured materials; nanotechnology; photoluminescence; scanning electron microscopy; semiconductor growth; wide band gap semiconductors; zinc compounds; MOCVD; SEM; Si; X-ray diffraction; XRD; ZnO; carrier gas flow rate; chemical vapour transport; condensation deposition process; glass substrates; hierarchical structures; metalo-organic chemical vapour deposition; microrods arrays; multilayer structures; nanorods; optical properties; photoluminescence; scanning electron microscopy; Argon; Chemical processes; Chemical vapor deposition; Glass; MOCVD; Nanostructures; Nonhomogeneous media; Optical microscopy; Scanning electron microscopy; Zinc oxide; MOCVD; SEM; XRD analysis; ZnO micro/nano structures; chemical vapour transport and condensation method; photoluminescence;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2007. CAS 2007. International

Conference_Location

Sinaia

ISSN

1545-827X

Print_ISBN

978-1-4244-0847-4

Type

conf

DOI

10.1109/SMICND.2007.4519726

Filename

4519726