DocumentCode
3439068
Title
Nanostructured Silicon for Optical Biosensors
Author
Miu, Mihaela ; Kleps, Irina ; Pavesi, Lorenzo ; Craciunoiu, Florea ; Ignat, Teodora ; Dinescu, Adrian ; Simion, Monica
Author_Institution
Nat. Inst. for R&D in Microtechnologies, Bucharest
Volume
2
fYear
2007
fDate
Oct. 15 2007-Sept. 17 2007
Firstpage
345
Lastpage
348
Abstract
A new silicon (Si) based transducer containing an assembly of microstructures (pyramidal and prismatic) and nanostructured elements (porous silicon) is proposed for future integration in a complex optical biosensor device. The morphology of the experimental structures was investigated using different microscopic techniques and optical properties were studied by photoluminescence (PL) measurements.
Keywords
biosensors; crystal microstructure; elemental semiconductors; nanostructured materials; optical sensors; photoluminescence; porous semiconductors; silicon; Si; microstructures; nanostructured silicon; optical biosensor device; optical properties; photoluminescence; porous silicon; silicon transducer; Assembly; Biomedical optical imaging; Biosensors; Integrated optics; Microstructure; Nanoscale devices; Optical devices; Optical microscopy; Silicon; Transducers; PL; microscopy; nanostructured silicon; optical biosensor tranducer;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2007. CAS 2007. International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-4244-0847-4
Type
conf
DOI
10.1109/SMICND.2007.4519731
Filename
4519731
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