Title :
Nanostructured Silicon for Optical Biosensors
Author :
Miu, Mihaela ; Kleps, Irina ; Pavesi, Lorenzo ; Craciunoiu, Florea ; Ignat, Teodora ; Dinescu, Adrian ; Simion, Monica
Author_Institution :
Nat. Inst. for R&D in Microtechnologies, Bucharest
fDate :
Oct. 15 2007-Sept. 17 2007
Abstract :
A new silicon (Si) based transducer containing an assembly of microstructures (pyramidal and prismatic) and nanostructured elements (porous silicon) is proposed for future integration in a complex optical biosensor device. The morphology of the experimental structures was investigated using different microscopic techniques and optical properties were studied by photoluminescence (PL) measurements.
Keywords :
biosensors; crystal microstructure; elemental semiconductors; nanostructured materials; optical sensors; photoluminescence; porous semiconductors; silicon; Si; microstructures; nanostructured silicon; optical biosensor device; optical properties; photoluminescence; porous silicon; silicon transducer; Assembly; Biomedical optical imaging; Biosensors; Integrated optics; Microstructure; Nanoscale devices; Optical devices; Optical microscopy; Silicon; Transducers; PL; microscopy; nanostructured silicon; optical biosensor tranducer;
Conference_Titel :
Semiconductor Conference, 2007. CAS 2007. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-0847-4
DOI :
10.1109/SMICND.2007.4519731
