ATE applied into fault modeling and fault diagnosis of AC servo motor PWM driver system

AC servo motor PWM driver system (including power module, power PWM driver board, cable, motor and photoelectric encoder/decoder) is a key sub-system of semiconductor assembly and packaging equipment. Aimed at its high fault rate, in this document we build the fault models of system based on PWM (Pulse Width Modulation) voltage, controller command and position feedback, find the test method of main faults, use ATE idea and method to perform test requirement analysis, resource allocation and driver program design, open the closed loop to decouple the system into LRUs (Line Replaceable Units) and locate the fault LRU(s) combining open loop and closed loop, on-line and off-line test. It shows that the fault modeling and ATE diagnosis above is successful by lots of experiments and test verification and has been applied into machine monitoring and fault diagnosis efficiently and effectively.