Micromachined low pass filters and coplanar waveguides for D-band frequencies based on HMDSN-membranes

Author

Duwe, Karen ; Hirsch, Stefanie ; Muller, Jörg

Author_Institution

Afbeitsbereich Mikrosystemtechnik, Technische Universittit Hamburg-Harburg, Germany

Volume

2

fYear

2001

fDate

2001

Firstpage

675

Abstract

This paper describes the fabrication and characterization of coplanar waveguides and low pass filters on thin dielectric membranes for D-band frequencies powered by transitions to rectangular waveguides. The membranes deposited from hexamethyldisilazane (HMDSN) were fabricated by removing the underlying silicon with micromachining techniques. Coplanar waveguides of various lengths based on these thin dielectric membranes have been fabricated and characterized as low-loss circuits for D-band frequencies. Two low pass filters with corner frequencies of 120 GHz and 170 GHz have been investigated, fabricated and characterized

Keywords

coplanar waveguide components; coplanar waveguides; low-pass filters; membranes; micromachining; millimetre wave filters; waveguide filters; 120 GHz; 170 GHz; D-band frequencies; HMDSN-membranes; Si; coplanar waveguide lengths; coplanar waveguides; corner frequencies; hexamethyldisilazane; low pass filters; low-loss circuits; micromachined coplanar waveguides; micromachined low pass filters; micromachining techniques; rectangular waveguide transitions; thin dielectric membranes; underlying silicon removal; Biomembranes; Coplanar waveguides; Dielectrics; Frequency; Low pass filters; Micromachining; Optical device fabrication; Rectangular waveguides; Silicon; Waveguide transitions;

fLanguage

English

Publisher

ieee

Conference_Titel

Physics and Engineering of Millimeter and Sub-Millimeter Waves, 2001. The Fourth International Kharkov Symposium on

Conference_Location

Kharkov

Print_ISBN

0-7803-6473-2

Type

conf

DOI

10.1109/MSMW.2001.947272

Filename

947272