Title :
Process qualification strategy for advanced embedded non-volatile memory technology - the Philips 0.18 μm embedded flash case
Author :
Tao, Guoqiao ; Scarpa, Andrta ; Van Dijk, Kitty ; Kuper, Fred G.
Author_Institution :
Philips Semicond., Nijmegen, Netherlands
fDate :
30 March-4 April 2003
Abstract :
A qualification strategy for advanced embedded non-volatile memory technology has been revealed. This strategy consists of: a thorough understanding of the requirements, extensive use and frequent update of the FMEA (failure mode effect analysis), a qualification plan with excellent coverage of all the risk areas, implementing effective in-line and off-line measures and control, and check-off of all the tests with good results. With such a strategy in place, the Philips 0.18 μm embedded flash technology has been successfully qualified for volume production.
Keywords :
CMOS memory circuits; failure analysis; flash memories; integrated circuit reliability; integrated circuit testing; leakage currents; process monitoring; risk analysis; 0.18 micron; Philips 0.18 μm embedded flash case; SILC characterization; advanced CMOS processes; embedded nonvolatile memory technology; failure mode effect analysis; failure modes; in-line measures; off-line measures; process qualification strategy; qualification plan; risk area coverage; volume production; CMOS technology; Computer aided software engineering; Failure analysis; Isolation technology; Nonvolatile memory; Packaging; Process design; Qualifications; Testing; Voltage;
Conference_Titel :
Reliability Physics Symposium Proceedings, 2003. 41st Annual. 2003 IEEE International
Print_ISBN :
0-7803-7649-8
DOI :
10.1109/RELPHY.2003.1197827
