DocumentCode :
3439241
Title :
Noncontact observation of microdefects in GaAs doped with various impurities by photo-thermal-radiation microscope
Author :
Mikoshiba, N. ; Tsubouchi, K. ; Akutsu, Y. ; Futatsuya, T. ; Kitano, T. ; Watanabe, H. ; Mizutani, T. ; Matsui, J.
Author_Institution :
Res. Inst. Electr. Commun., Tohoku Univ., Sendai, Japan
fYear :
1988
fDate :
2-5 Oct 1988
Firstpage :
459
Abstract :
The authors measured microdefects in GaAs doped with various impurities by a photo-thermal-radiation (PTR) microscope to investigate the nature of microdefects found in previous experiments. The samples used were Si-, S-, Te-, and Zn-doped GaAs wafers. The PTR signals were measured as a function of the wavelength of excitation light. The authors found a strong dopant dependence of the PTR spectra. The PTR signal has a clear maximum at λ≅900 nm only in Si-doped GaAs. The authors measured the PTR topographs in various GaAs wafers and compared them with photoluminescence topographs. The experimental results showed that the DTR technique gives important and unique information on the nonradiative microdefects in GaAs, although the nature of the microdefects is still uncertain
Keywords :
III-V semiconductors; flaw detection; gallium arsenide; luminescence of inorganic solids; photoluminescence; photothermal spectroscopy; GaAs; GaAs:S; GaAs:Si; GaAs:Te; GaAs:Zn; microdefects; photo-thermal-radiation microscope; photoluminescence topographs; wafers; wavelength of excitation light; Gallium arsenide; Impurities; Laser excitation; Light sources; Microscopy; Power lasers; Power measurement; Surface emitting lasers; Ultrasonic variables measurement; Wavelength measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 1988. Proceedings., IEEE 1988
Conference_Location :
Chicago, IL
Type :
conf
DOI :
10.1109/ULTSYM.1988.49419
Filename :
49419
Link To Document :
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