Title :
Current applications of silicon based microsystems
Abstract :
A short overview will be given concerning recent advances in micromachining technology, including surface and bulk silicon micromachining, galvano deposition and bonding techniques. Following this short overview, a number of examples dealing with the design, fabrication and application of microsystems will be presented. In particular the following microsystems will be discussed in detail: (1) miniaturized chemical analysis systems; (2) micro instrumentation for space research; (3) miniaturized fluid handling systems; (4) scanning probe systems; (5) electrostatic and ultrasonic millimotors; (6) micro opto-mechanical systems
Keywords :
Fabry-Perot resonators; aerospace biophysics; biological techniques; biomedical equipment; biosensors; chemical sensors; electro-optical modulation; electroplating; electrostatic devices; elemental semiconductors; flow control; membranes; micromachining; micromechanical resonators; micromotors; micropumps; microsensors; patient treatment; scanning probe microscopy; silicon; ultrasonic motors; valves; wafer bonding; 3D microstructures; Fabry-Perot modulator; Si; bioreactor; bonding techniques; bulk micromachining; design; dosing system; electrostatic millimotors; elemental semiconductor; fabrication; galvano deposition; liquid flow sensor; micro-opto-mechanical systems; micropumps; microsystems; miniaturized chemical analysis systems; miniaturized fluid handling systems; scanning force microscope; scanning probe systems; space laboratory culture; space research microinstrumentation; surface micromachining; ultrasonic millimotors; Biomembranes; Bonding; Chemical analysis; Chemical sensors; Fabrication; Laboratories; Micromachining; Microstructure; Silicon; Wet etching;
Conference_Titel :
Micro Machine and Human Science, 1995. MHS '95., Proceedings of the Sixth International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-2676-8
DOI :
10.1109/MHS.1995.494210
