A new formulation for accurate numerical extraction of interconnect capacitance in ULSI

We present a new formulation for numerical extraction of capacitance in ULSI interconnects, which employs a single-layer potential description to compute the charge density distribution, and hence the coupling capacitance. The single-layer potential description also yields a Fredholm integral equation of the second kind, for which efficient numerical algorithms are available. Here, we consider not only the potential but also the electric flux, offering a direct means of controlling the overall computational accuracy and efficiency. The technique can be employed in other application areas, including micro-electromechanical systems (MEMS)