Micro fluid sensors and actuators

Author

Stemme, Göran

Author_Institution

Dept. of Signals, Sensors & Syst., R. Inst. of Technol., Stockholm, Sweden

fYear

1995

fDate

4-6 Oct 1995

Firstpage

45

Lastpage

52

Abstract

This paper is an overview of different techniques and principles which can be used to fabricate micro fluid devices for use in liquid applications with internal tube or channel flows. Examples of liquid channel fabrication techniques, flow sensors, active valves, micropumps and passive components such as valves and filters are described

Keywords

channel flow; diaphragms; etching; filtration; flow control; flow measurement; flowmeters; microactuators; micromachining; micropumps; microsensors; pipe flow; reviews; valves; wafer bonding; active valves; bimorphs; channel flows; check valves; diaphragm pumps; flow restrictors; flow sensors; internal tube flows; liquid channel fabrication techniques; microactuators; microfluid devices; micromachining; micropumps; microsensors; particle filters; passive filters; passive valves; polysilicon; seals; thermal flow sensors; undercut etching; wafer bonding; Actuators; Anisotropic magnetoresistance; Etching; Fabrication; Glass; Passive filters; Plastics; Silicon; Valves; Wafer bonding;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Machine and Human Science, 1995. MHS '95., Proceedings of the Sixth International Symposium on

Conference_Location

Nagoya

Print_ISBN

0-7803-2676-8

Type

conf

DOI

10.1109/MHS.1995.494216

Filename

494216