Title :
Micro fluid sensors and actuators
Author_Institution :
Dept. of Signals, Sensors & Syst., R. Inst. of Technol., Stockholm, Sweden
Abstract :
This paper is an overview of different techniques and principles which can be used to fabricate micro fluid devices for use in liquid applications with internal tube or channel flows. Examples of liquid channel fabrication techniques, flow sensors, active valves, micropumps and passive components such as valves and filters are described
Keywords :
channel flow; diaphragms; etching; filtration; flow control; flow measurement; flowmeters; microactuators; micromachining; micropumps; microsensors; pipe flow; reviews; valves; wafer bonding; active valves; bimorphs; channel flows; check valves; diaphragm pumps; flow restrictors; flow sensors; internal tube flows; liquid channel fabrication techniques; microactuators; microfluid devices; micromachining; micropumps; microsensors; particle filters; passive filters; passive valves; polysilicon; seals; thermal flow sensors; undercut etching; wafer bonding; Actuators; Anisotropic magnetoresistance; Etching; Fabrication; Glass; Passive filters; Plastics; Silicon; Valves; Wafer bonding;
Conference_Titel :
Micro Machine and Human Science, 1995. MHS '95., Proceedings of the Sixth International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-2676-8
DOI :
10.1109/MHS.1995.494216
