Title :
A summary of applications of uncooled microbolometer sensors
Author :
Breen, Thomas ; Butler, Neal ; Kohin, Margaret ; Marshall, Charles A. ; Murphy, Robert ; Parker, Todd ; Piscitelli, Neil ; Silva, Ray
Author_Institution :
Lockheed Martin IR Imaging Syst., Lexington, MA, USA
Abstract :
Lockheed Martin IR Imaging Systems is developing low cost, high performance, uncooled infrared imaging products for both military and commercial applications. These products are based on microbolometer technology, a silicon micromachined sensor that combines wafer level silicon processing with a device structure capable of yielding excellent imaging performance. Here we report on several applications that are utilizing the Lockheed Martin microbolometer sensor
Keywords :
bolometers; elemental semiconductors; image sensors; infrared detectors; infrared imaging; microsensors; military equipment; silicon; Lockheed Martin; Si; commercial applications; infrared imaging products; military and commercial applications; silicon micromachined sensor; uncooled microbolometer sensors; wafer level silicon processing; Cameras; Crosstalk; Image sensors; Infrared image sensors; Optical imaging; Sensor arrays; Sensor phenomena and characterization; Sensor systems and applications; Silicon; Temperature sensors;
Conference_Titel :
Aerospace Conference, 1999. Proceedings. 1999 IEEE
Conference_Location :
Snowmass at Aspen, CO
Print_ISBN :
0-7803-5425-7
DOI :
10.1109/AERO.1999.789796
