Title :
Tube type micro manipulator using shape memory alloy (SMA)
Author :
Aramaki, Shinji ; Kaneko, Shinji ; Arai, Kazuhiko ; Takahashi, Yuichiro ; Adachi, Hideyuki ; Yanagisawa, Kazuhisa
Author_Institution :
Olympus Opt. Co. Ltd., Tokyo, Japan
Abstract :
A five degrees of freedom tube type micro manipulator has been successfully developed. The manipulator is 1 mm in diameter and 80 mm in length. The SMA (shape memory alloy) plate is applied as an actuator. For integration of electrical components of this manipulator, MIF (multifunction integrated film) has been developed. The MIF is flexible film, which includes heaters, sensors, lead wires and electrodes. This manipulator was controlled with position feedback loop, using the sensor´s information
Keywords :
feedback; manipulators; micromechanical devices; polymer films; position control; shape memory effects; thin film devices; 1 mm; 80 mm; electrodes; flexible film; heaters; lead wires; multifunction integrated film; position feedback loop; sensors; shape memory alloy; tube type micro manipulator; Actuators; Coils; Displacement measurement; Electrodes; Heating; Position control; Semiconductor films; Shape memory alloys; Thermal sensors; Wires;
Conference_Titel :
Micro Machine and Human Science, 1995. MHS '95., Proceedings of the Sixth International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-2676-8
DOI :
10.1109/MHS.1995.494227
