Analysis of Displacements of a Polymeric Microgripper

Author

Voicu, R. ; Tibeica, C. ; Eftime, L. ; Muller, R.

Author_Institution

IMT, Nat. Inst. for R&D in Microtechnologies, Bucharest

Volume

2

fYear

2007

fDate

Oct. 15 2007-Sept. 17 2007

Firstpage

567

Lastpage

570

Abstract

A polymeric, electro-thermally actuated microgripper has been designed. Preliminary experimental tests were carried out. Analyses of different displacements of the microgripper were performed. We present a study of different geometries of the metallic layers of the microgripper structure in order to optimise the model structure, by reducing the displacements (vertical and horizontal) which can make the structure instable or difficult to operate. The analyses of the displacements were studied using finite-element modelling and performing electro-thermo-mechanical simulations.

Keywords

bioMEMS; finite element analysis; grippers; microactuators; micromanipulators; polymers; displacement analysis; electro-thermo-mechanical simulation; finite-element modelling; metallic layers; polymeric electro-thermally actuated microgripper design; Analytical models; Arm; Computational modeling; Computer simulation; Finite element methods; Gold; Grippers; Performance analysis; Polymers; Voltage; FEM analysis; SU-8 structure; electro-thermal actuator; microgripper;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2007. CAS 2007. International

Conference_Location

Sinaia

ISSN

1545-827X

Print_ISBN

978-1-4244-0847-4

Type

conf

DOI

10.1109/SMICND.2007.4519787

Filename

4519787