Title :
Modeling and design of a sensor for two dimensional linear motors
Author :
Crawford, D. ; Wong, F.Y. ; Youcef-Toumi, E.
Author_Institution :
Dept. of Mech. Eng., MIT, Cambridge, MA, USA
Abstract :
This paper presents the design, fabrication, and evaluation of an inductive position sensor for a two dimensional linear motor. The working principle and basic components of the sensor are described. A description of the model used to simulate the dynamics and investigate the effects of various design parameters is also presented. The result is a prototype sensor with a resolution of 4 microns
Keywords :
electric sensing devices; feedback; frequency response; linear motors; position control; sensitivity analysis; simulation; 2D linear motors; dynamics; feedback; frequency response; inductive position sensor; modeling; sensitivity analysis; Coils; Induction motors; Magnetic cores; Magnetic flux; Magnetic sensors; Mechanical sensors; Permanent magnet motors; Sensor systems; Teeth; Temperature sensors;
Conference_Titel :
Robotics and Automation, 1995. Proceedings., 1995 IEEE International Conference on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-1965-6
DOI :
10.1109/ROBOT.1995.525614
