Biomedical micro device fabricated by micro stereo lithography (IH process). “Metabiotic device”-a synthetic approach for life science

Author

Ikuta, Koji

Author_Institution

Dept. of Micro Syst. Eng., Nagoya Univ., Japan

fYear

1995

fDate

4-6 Oct 1995

Firstpage

67

Lastpage

70

Abstract

The synthetic approach named “Metabiotics” for new life science is proposed. It is based on the IH process (Integrated Harden Polymer Process) developed by the author. The real three dimensional micro fabrication using micro stereo lithography and electroplating is applicable for both polymer and metal micro structure. Firstly, a new type of micro integrated fluid system (MIFS), whose concept is a hybrid system combined with conventional silicon process and new IH process, is described. Three dimensional MIFS is prototyped successfully. Finally, production concepts for future “Metabiotic devices” are described

Keywords

biocontrol; biomedical equipment; biomimetics; biosensors; biotechnology; electroplating; flow control; microactuators; micromachining; microsensors; photolithography; polymer films; valves; 3D microfabrication; IH process; UV solidified polymer; biochemical system; biomedical microdevice fabrication; biotechnology; electroplating; hybrid system; life science; metabiotic device; metal microstructure; microchemical analyser; microfluid components; microintegrated fluid system; micropipe; microstereolithography; microvalve; polymer microstructure; synthetic approach; Biomedical engineering; Costs; Fabrication; Fluidics; Inorganic materials; Lithography; Polymers; Production; Shape; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Machine and Human Science, 1995. MHS '95., Proceedings of the Sixth International Symposium on

Conference_Location

Nagoya

Print_ISBN

0-7803-2676-8

Type

conf

DOI

10.1109/MHS.1995.494251

Filename

494251