Title :
Biomedical micro device fabricated by micro stereo lithography (IH process). “Metabiotic device”-a synthetic approach for life science
Author_Institution :
Dept. of Micro Syst. Eng., Nagoya Univ., Japan
Abstract :
The synthetic approach named “Metabiotics” for new life science is proposed. It is based on the IH process (Integrated Harden Polymer Process) developed by the author. The real three dimensional micro fabrication using micro stereo lithography and electroplating is applicable for both polymer and metal micro structure. Firstly, a new type of micro integrated fluid system (MIFS), whose concept is a hybrid system combined with conventional silicon process and new IH process, is described. Three dimensional MIFS is prototyped successfully. Finally, production concepts for future “Metabiotic devices” are described
Keywords :
biocontrol; biomedical equipment; biomimetics; biosensors; biotechnology; electroplating; flow control; microactuators; micromachining; microsensors; photolithography; polymer films; valves; 3D microfabrication; IH process; UV solidified polymer; biochemical system; biomedical microdevice fabrication; biotechnology; electroplating; hybrid system; life science; metabiotic device; metal microstructure; microchemical analyser; microfluid components; microintegrated fluid system; micropipe; microstereolithography; microvalve; polymer microstructure; synthetic approach; Biomedical engineering; Costs; Fabrication; Fluidics; Inorganic materials; Lithography; Polymers; Production; Shape; Silicon;
Conference_Titel :
Micro Machine and Human Science, 1995. MHS '95., Proceedings of the Sixth International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-2676-8
DOI :
10.1109/MHS.1995.494251
