• DocumentCode
    3440318
  • Title

    Dielectric functions and growth dynamics of CuIn1−x,GaxSe2 absorber layers via in situ real time spectroscopic ellipsometry

  • Author

    Walker, J.D. ; Khatri, H. ; Ranjan, V. ; Little, S. ; Zartman, R. ; Collins, R.W. ; Marsillac, Sylvain

  • Author_Institution
    Wright Center for Photovoltaics Innovation & Commercialization, Univ. of Toledo, Toledo, OH, USA
  • fYear
    2009
  • fDate
    7-12 June 2009
  • Abstract
    In situ, real time spectroscopic ellipsometry (RTSE) has been used to study the growth dynamics of the chalcopyrite thin film absorber layer; copper indium gallium diselenide, CuIn1-x,GaxSe2. Time dependent bulk layer (db) and surface roughness layer (ds) thicknesses were extracted in the early stages of film growth using growth temperature optical dielectric functions determined in the same analysis. We find that an accurate determination of the dielectric function can be obtained during the initial stages of film growth where the surface roughness is relatively low. Non-destructive optical feedback via RTSE on the growth dynamics and electronic properties of the absorber layer could play an important role in improving device efficiencies on both the laboratory and industrial scales.
  • Keywords
    copper compounds; dielectric function; ellipsometry; gallium compounds; indium compounds; semiconductor growth; semiconductor thin films; surface roughness; CuIn1-xGaxSe2; chalcopyrite thin film absorber layer; copper indium gallium diselenide; film growth; growth dynamics; growth temperature optical dielectric functions; in situ real time spectroscopic ellipsometry; nondestructive optical feedback; surface roughness layer thickness; time dependent bulk layer thickness; Copper; Dielectric thin films; Ellipsometry; Gallium compounds; Indium; Optical feedback; Optical films; Rough surfaces; Spectroscopy; Surface roughness;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Specialists Conference (PVSC), 2009 34th IEEE
  • Conference_Location
    Philadelphia, PA
  • ISSN
    0160-8371
  • Print_ISBN
    978-1-4244-2949-3
  • Electronic_ISBN
    0160-8371
  • Type

    conf

  • DOI
    10.1109/PVSC.2009.5411223
  • Filename
    5411223