DocumentCode
3440318
Title
Dielectric functions and growth dynamics of CuIn1−x ,Gax Se2 absorber layers via in situ real time spectroscopic ellipsometry
Author
Walker, J.D. ; Khatri, H. ; Ranjan, V. ; Little, S. ; Zartman, R. ; Collins, R.W. ; Marsillac, Sylvain
Author_Institution
Wright Center for Photovoltaics Innovation & Commercialization, Univ. of Toledo, Toledo, OH, USA
fYear
2009
fDate
7-12 June 2009
Abstract
In situ, real time spectroscopic ellipsometry (RTSE) has been used to study the growth dynamics of the chalcopyrite thin film absorber layer; copper indium gallium diselenide, CuIn1-x,GaxSe2. Time dependent bulk layer (db) and surface roughness layer (ds) thicknesses were extracted in the early stages of film growth using growth temperature optical dielectric functions determined in the same analysis. We find that an accurate determination of the dielectric function can be obtained during the initial stages of film growth where the surface roughness is relatively low. Non-destructive optical feedback via RTSE on the growth dynamics and electronic properties of the absorber layer could play an important role in improving device efficiencies on both the laboratory and industrial scales.
Keywords
copper compounds; dielectric function; ellipsometry; gallium compounds; indium compounds; semiconductor growth; semiconductor thin films; surface roughness; CuIn1-xGaxSe2; chalcopyrite thin film absorber layer; copper indium gallium diselenide; film growth; growth dynamics; growth temperature optical dielectric functions; in situ real time spectroscopic ellipsometry; nondestructive optical feedback; surface roughness layer thickness; time dependent bulk layer thickness; Copper; Dielectric thin films; Ellipsometry; Gallium compounds; Indium; Optical feedback; Optical films; Rough surfaces; Spectroscopy; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Specialists Conference (PVSC), 2009 34th IEEE
Conference_Location
Philadelphia, PA
ISSN
0160-8371
Print_ISBN
978-1-4244-2949-3
Electronic_ISBN
0160-8371
Type
conf
DOI
10.1109/PVSC.2009.5411223
Filename
5411223
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