DocumentCode :
3441309
Title :
Investigation of laser scribing techniques to improve thin film solar cell manufacturability and performance
Author :
Webb, Andrew ; Osborne, Mike
Author_Institution :
Bus. Dev., OpTek Syst. Inc., Groton, MA, USA
fYear :
2009
fDate :
7-12 June 2009
Abstract :
The application of laser based materials processing for precision micro scale manufacturing in the electronics and Semiconductor industry is widespread and accepted. With the explosive growth and need for enhanced manufacturing capacity in the solar industry, this capability is now being applied and refined for solar cell manufacturing. The motivation comes from a need for ongoing improvements in throughput, yield and cell performance. This paper will review some of the latest laser technologies and techniques available and discuss the issues to be considered in choosing the most appropriate processing parameters. High repetition rate, short duration pulsed lasers have improved rapidly in recent years in terms of both performance and reliability enabling flexible, cost effective scribing and dicing of many material types including thin films, metals, silicon, plastics, ceramics and glass. Demonstrating the relevance of laser techniques, application examples where laser processing is being transferred from other industries for solar cell production will be presented, including highly accurate material handling from the flat panel display industry and adaptation of a thin film capacitor laser process for flexible solar cells. OpTek Systems design and provide fully integrated machines and sub-contract services for laser processes. They are located in the UK and North America.
Keywords :
ceramics; elemental semiconductors; flat panel displays; glass; plastics; pulsed laser deposition; semiconductor device manufacture; semiconductor device reliability; silicon; solar cells; thin film capacitors; thin films; OpTek Systems design; ceramics; cost effective scribing; duration pulsed lasers; flat panel display industry; flexible solar cells; glass; laser scribing technique; laser technology; material handling; metals; plastics; reliability; silicon; solar cell production; thin film capacitor laser process; thin film solar cell manufacturability; thin films; Laser applications; Machinery production industries; Manufacturing; Materials processing; Photovoltaic cells; Plastic films; Semiconductor device manufacture; Semiconductor lasers; Semiconductor thin films; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Photovoltaic Specialists Conference (PVSC), 2009 34th IEEE
Conference_Location :
Philadelphia, PA
ISSN :
0160-8371
Print_ISBN :
978-1-4244-2949-3
Electronic_ISBN :
0160-8371
Type :
conf
DOI :
10.1109/PVSC.2009.5411270
Filename :
5411270
Link To Document :
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