Title :
New physical insight and modeling of second breakdown (It/sub 2/) phenomenon in advanced esd protection devices
Author :
Chatterjee, Amitabh ; Duvvury, Charvaka ; Banerjee, Kaustav
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA
Abstract :
Second breakdown phenomenon in advanced NMOS ESD protection devices has remained an enigma due to the complex electrical and thermal effects that are responsible for its triggering. For the first time, we present a critical study of the high current phenomenon in ultra short-time scale to understand the physics of instability in protection devices around the second breakdown region. It is demonstrated that for advanced protection devices, carrier heating in the high field drain region causes a fall in the saturation drift velocity, which increases the transit time of carriers through the depletion region. This in turn, causes greater impact ionization due to higher accumulation of avalanche-generated carriers; leading to the formation of a propagating ionizing wave front, which culminates in a regenerative avalanche injection induced second breakdown failure
Keywords :
MOS integrated circuits; avalanche breakdown; electrostatic discharge; impact ionisation; semiconductor device breakdown; semiconductor device models; ESD protection devices; NMOS; avalanche generated carriers; carrier heating; depletion region; high current phenomenon; high field drain region; impact ionization; ionizing wave front; physical insight; physical modeling; regenerative avalanche injection; saturation drift velocity; second breakdown phenomenon; transit time; ultra short time scale; Avalanche breakdown; Circuit simulation; Electric breakdown; Electrostatic discharge; Physics; Power dissipation; Predictive models; Protection; Temperature; Voltage;
Conference_Titel :
Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-9268-X
DOI :
10.1109/IEDM.2005.1609304