Silver doping of chalcogenide thin films for optical waveguide fabrication

Author

Fick, J. ; Wilson, C. ; Lopez, C. ; Richardson, K.A. ; Hamel, V. ; Valle, R. ; Villeneuve, A.

Author_Institution

Lab. d´Electromagnetisme, Microondes, et Optoelectronique, ENSERG, Grenoble, France

fYear

2001

fDate

11-11 May 2001

Firstpage

15

Abstract

Summary form only given. Silver doping of chalcogenide thin glass films is proposed for optical waveguide fabrication. This doping process is widely studied and used for the fabrication of diffractive optics devices. The high index increase typically achieved by silver doping of As/sub 2/S/sub 3/ chalcogenide glass (/spl Delta/n/spl ap/0.4), enables the fabrication of channel waveguides in the near infrared. Monomode waveguides requires, however, the selected doping of a very thin fraction of the films (40-50 nm for 400 nm of As/sub 2/S/sub 3/).

Keywords

arsenic compounds; chalcogenide glasses; optical fabrication; optical films; optical glass; optical planar waveguides; refractive index; silver; As/sub 2/S/sub 3/:Ag; chalcogenide thin films; channel waveguides; diffractive optics devices; dispersion curve; heat treatment; high index increase; interference fringe shift; monomode waveguides; optical waveguide fabrication; patterning; refractive index; silver doping; wet-etching lithography; Doping; Glass; Optical device fabrication; Optical films; Optical refraction; Optical variables control; Optical waveguides; Optimized production technology; Silver; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2001. CLEO '01. Technical Digest. Summaries of papers presented at the Conference on

Conference_Location

Baltimore, MD, USA

Print_ISBN

1-55752-662-1

Type

conf

DOI

10.1109/CLEO.2001.947403

Filename

947403