Title :
Silver doping of chalcogenide thin films for optical waveguide fabrication
Author :
Fick, J. ; Wilson, C. ; Lopez, C. ; Richardson, K.A. ; Hamel, V. ; Valle, R. ; Villeneuve, A.
Author_Institution :
Lab. d´Electromagnetisme, Microondes, et Optoelectronique, ENSERG, Grenoble, France
Abstract :
Summary form only given. Silver doping of chalcogenide thin glass films is proposed for optical waveguide fabrication. This doping process is widely studied and used for the fabrication of diffractive optics devices. The high index increase typically achieved by silver doping of As/sub 2/S/sub 3/ chalcogenide glass (/spl Delta/n/spl ap/0.4), enables the fabrication of channel waveguides in the near infrared. Monomode waveguides requires, however, the selected doping of a very thin fraction of the films (40-50 nm for 400 nm of As/sub 2/S/sub 3/).
Keywords :
arsenic compounds; chalcogenide glasses; optical fabrication; optical films; optical glass; optical planar waveguides; refractive index; silver; As/sub 2/S/sub 3/:Ag; chalcogenide thin films; channel waveguides; diffractive optics devices; dispersion curve; heat treatment; high index increase; interference fringe shift; monomode waveguides; optical waveguide fabrication; patterning; refractive index; silver doping; wet-etching lithography; Doping; Glass; Optical device fabrication; Optical films; Optical refraction; Optical variables control; Optical waveguides; Optimized production technology; Silver; Substrates;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO '01. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-662-1
DOI :
10.1109/CLEO.2001.947403