Advances in compact discharge-pumped soft X-ray lasers and applications

Summary form only given. For many years researchers have envisioned the development of compact high repetition rate soft lasers with high spatial coherence that be routinely used in numerous applications. With demonstrated average powers of several mW and millijoule-level pulse energy at 46.9 nm the Ne-like Ar capillary discharge-pumped laser is the first compact laser to reach this goal. We summarize the development status of tabletop soft X-ray lasers based on capillary discharge excitation, and give examples of their successful use in dense plasma interferometry, soft X-ray reflectometry for the determination of optical constants, characterization of diffraction gratings, laser ablation of materials, and plasma generation. Lasing at 52.9 nm line in Ne-like Cl, and the prospects for lasing at shorter wavelengths are also discussed.