DocumentCode
3441956
Title
Non-linearity cancellation in MEMS resonators for improved power-handling
Author
Agarwal, M. ; Park, K. ; Candler, R. ; Hopcroft, M. ; Jha, C. ; Melamud, R. ; Kim, B. ; Murmann, B. ; Kenny, T.W.
Author_Institution
Departments of Electr. & Mech. Eng., Stanford Univ., CA
fYear
2005
fDate
5-5 Dec. 2005
Firstpage
286
Lastpage
289
Abstract
In this work, we present mathematical analysis and experimental verification of the bifurcation limited power handling in MEMS resonators. We report useful cancellation between electrical and mechanical non-linearities. Within the scaling limits it has been found that the power handling improves for devices with larger electrode to resonator gaps. We also report an alternative method of measuring critical bifurcation using shifts in resonant frequency
Keywords
bifurcation; micromechanical resonators; MEMS resonators; bifurcation; electrode gaps; nonlinearity cancellation; power handling; resonant frequency; resonator gaps; Bifurcation; Differential equations; Electrodes; Frequency measurement; Mechanical engineering; Micromechanical devices; Nonlinear equations; Phase noise; Resonant frequency; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
Conference_Location
Washington, DC
Print_ISBN
0-7803-9268-X
Type
conf
DOI
10.1109/IEDM.2005.1609330
Filename
1609330
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