Title :
Non-linearity cancellation in MEMS resonators for improved power-handling
Author :
Agarwal, M. ; Park, K. ; Candler, R. ; Hopcroft, M. ; Jha, C. ; Melamud, R. ; Kim, B. ; Murmann, B. ; Kenny, T.W.
Author_Institution :
Departments of Electr. & Mech. Eng., Stanford Univ., CA
Abstract :
In this work, we present mathematical analysis and experimental verification of the bifurcation limited power handling in MEMS resonators. We report useful cancellation between electrical and mechanical non-linearities. Within the scaling limits it has been found that the power handling improves for devices with larger electrode to resonator gaps. We also report an alternative method of measuring critical bifurcation using shifts in resonant frequency
Keywords :
bifurcation; micromechanical resonators; MEMS resonators; bifurcation; electrode gaps; nonlinearity cancellation; power handling; resonant frequency; resonator gaps; Bifurcation; Differential equations; Electrodes; Frequency measurement; Mechanical engineering; Micromechanical devices; Nonlinear equations; Phase noise; Resonant frequency; Voltage;
Conference_Titel :
Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-9268-X
DOI :
10.1109/IEDM.2005.1609330
