Title :
PECVD-oxynitride gas chromatographic columns
Author :
Agah, M. ; Wise, K.D.
Author_Institution :
Bradley Dept. of Electr. & Comput. Eng., Virginia Tech., Blacksburg, VA
Abstract :
This paper describes the realization of low-power high-speed micro gas chromatography columns for portable gas analysis systems. The 25cm-long ultra-low-mass MEMS columns, fabricated using stress-free PECVD-oxynitride films in a CMOS-compatible process, allow high-performance separations of n-alkane gas mixtures, are capable of multi-second analysis, and can dissipate less than 10mW at 150degC in vacuum
Keywords :
chromatography; gas mixtures; gas sensors; low-power electronics; micromechanical devices; plasma CVD; 150 C; 25 cm; CMOS-compatible process; MEMS columns; PECVD; gas mixtures separation; microgas chromatography columns; oxynitride films; portable gas analysis; Energy consumption; Etching; Fabrication; Gas chromatography; Optical films; Optical refraction; Plasma measurements; Plasma temperature; Silicon; Wafer bonding;
Conference_Titel :
Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-9268-X
DOI :
10.1109/IEDM.2005.1609334
