DocumentCode :
3442162
Title :
Ultra-compact 90/spl deg/ bends and MMI couplers in silicon-on-insulator
Author :
Ahmad, R.U. ; Camarda, G.C. ; Pizutto, R. ; Espinola, R.I. ; Osgood, R.M., Jr.
Author_Institution :
Microelectron. Sci. Lab., Columbia Univ., New York, NY, USA
fYear :
2001
fDate :
11-11 May 2001
Firstpage :
36
Lastpage :
37
Abstract :
Summary form only given. There has recently been a surge of interest in thin SOI-based integrated optics, where the silicon guiding layer is less than a micrometer thick. Optical devices on this platform can be potentially integrated with SOI-based CMOS technology, which is currently being favored for high speed and low-voltage applications. For integrated optics, equally important is the fact that the high refractive index difference between the Si-core and the SiO/sub 2/ substrate (/spl Delta/n = 2.0) can be utilized to significantly reduce the dimensions of photonic integrated circuits. The thin-SOI structures used in our study contains a 0.34 /spl mu/m Si guiding layer on a 1.0 /spl mu/m thick buried oxide layer.
Keywords :
CMOS integrated circuits; integrated optoelectronics; light interference; optical couplers; optical planar waveguides; refractive index; silicon; silicon-on-insulator; substrates; waveguide discontinuities; 0.34 micron; 1 micron; MMI couplers; SOI-based CMOS technology; SOI-based integrated optics; Si guiding layer; Si-SiO/sub 2/; SiO/sub 2/; beam-propagation method; high refractive index difference; high speed applications; low-voltage applications; photonic integrated circuits; silicon guiding layer; silicon-on-insulator; single-mode waveguide; thick buried oxide layer; thin SOI structures; ultra-compact 90/spl deg/ bends; Couplers; Gain measurement; Gallium arsenide; Integrated optics; Mirrors; Optical losses; Optical refraction; Optical variables control; Optical waveguides; Silicon on insulator technology;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO '01. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-662-1
Type :
conf
DOI :
10.1109/CLEO.2001.947431
Filename :
947431
Link To Document :
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