Title :
Analysis of liquid-phase-based sensors utilizing SH surface waves on rotated Y-cut quartz
Author :
Shana, Z. ; Josse, F.
Author_Institution :
Dept. of Electr., Comput., & Biomed. Eng., Marquette Univ., Milwaukee, WI, USA
Abstract :
Surface shear horizontal (SH) wave propagation at the boundary of rotated Y-cut quartz with a viscous fluid is theoretically analyzed for liquid-phase-based sensor applications. Analytical expressions are obtained for the fractional velocity change and attenuation coefficient in terms of the material constants, liquid viscosity and density, and wave frequency. The analysis is also modified to include the effects of a thin layer of dielectric material to increase the device sensitivity. This is due to the fact that the effect of mass loading of the film is to convert the subsurface wave radiation into a guided surface SH wave. The effects of liquid relaxation time are also accounted for in the analysis, and it is shown that the relaxation time sets detection limits on the range of liquid viscosity than can be measured
Keywords :
detectors; surface acoustic wave devices; SAW devices; SH surface waves; attenuation coefficient; density; fractional velocity change; liquid viscosity; liquid-phase-based sensors; mass loading; material constants; rotated Y-cut quartz; subsurface wave radiation; viscous fluid; wave frequency; Acoustic signal detection; Acoustic waves; Attenuation; Biosensors; Frequency; Geometry; Phase change materials; Surface acoustic wave devices; Surface waves; Viscosity;
Conference_Titel :
Ultrasonics Symposium, 1988. Proceedings., IEEE 1988
Conference_Location :
Chicago, IL
DOI :
10.1109/ULTSYM.1988.49437
