Title :
Flow sensor using surface acoustic waves
Author_Institution :
Dept. of Electr., Comput., & Biomed. Eng., Marquette Univ., Milwaukee, WI, USA
Abstract :
The use of a surface-acoustic-wave (SAW) device to measure rate of gas flow is described. The device is a delay-line stabilized SAW oscillator heated to a suitable temperature above the ambient. The delay line is placed in the path of the flowing gas. Flow of gas carries heat away by convection. This lowers the substrate temperature, thereby causing change in the oscillator frequency. The frequency of a 68-MHz oscillator fabricated on Y-cut, Z-propagating lithium niobate substrate increases by more than 160 kHz for variation in flow rate from 0 to 1000 ccm
Keywords :
flow measurement; flowmeters; surface acoustic wave devices; 68 MHz; LiNbO3; SAW; delay-line; gas flow; oscillator frequency; surface acoustic waves; Acoustic measurements; Acoustic sensors; Acoustic waves; Delay; Fluid flow; Fluid flow measurement; Frequency; Oscillators; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1988. Proceedings., IEEE 1988
Conference_Location :
Chicago, IL
DOI :
10.1109/ULTSYM.1988.49438
