Thin film bulk acoustic wave resonator and filter technology

Author

Lakin, K.M. ; McCarron, K.T. ; Belsick, J. ; McDonald, J.F.

Author_Institution

TFR Technologies, Inc, Bend, OR, USA

fYear

2001

fDate

2001

Firstpage

89

Lastpage

92

Abstract

This paper presents a short summary of progress made in the development of thin film resonators and filters. Over 300 different filter and resonator products have been developed spanning a frequency range of 500 MHz to over 12 GHz. While most of these products are custom designed for Government and commercial customers a number of filters and resonators are sufficiently generic to be discussed at this conference. All products share common issues of bandwidth, packaging, manufacturing, reliability, and temperature coefficients. Specific examples are given of resonators or filters designed and produced for commercial GPS and other markets

Keywords

UHF filters; acoustic resonator filters; bulk acoustic wave devices; microwave filters; thin film devices; 300 MHz to 12 GHz; GPS; bandwidth; manufacturing; packaging; reliability; temperature coefficients; thin film bulk acoustic wave resonator; thin film filters; thin film resonators; Acoustic waves; Bandwidth; Frequency; Government; Manufacturing; Packaging; Product design; Resonator filters; Temperature; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Radio and Wireless Conference, 2001. RAWCON 2001. IEEE

Conference_Location

Waltham, MA

Print_ISBN

0-7803-7189-5

Type

conf

DOI

10.1109/RAWCON.2001.947532

Filename

947532