Spectral response during modulation of hybrid ion implanted selectively oxidized VCSELs

Summary form only given. Selectively oxidized vertical cavity surface emitting lasers (VCSELs) have demonstrated record performance, but due to strong index confinement created by the buried oxide layers these lasers typically operate in multiple transverse optical modes. High power single mode VCSEL operation would be desirable for many applications, including data transmission in single mode optical fiber. Recently we achieved record high single mode continuous wave output (>5 mW) from 850 nm VCSELs fabricated using a hybrid ion implantation and selective oxidation device structure. Here we report a side mode suppression ratio of 35 dB during large signal modulation and determine that thermal lensing is partially responsible for the modal discrimination in these VCSELs.