Title :
Wideband Microwave Power Sensor Based on MEMS Technology
Author :
Alastalo, Ani ; Kyynäräinen, Jukka ; Seppä, Heikki ; Karkkainen, Anu ; Pesonen, Nadine ; Lahdes, M. ; Vaha-Heikkila, T. ; Pekko, Panu ; Dekker, James
Author_Institution :
Dept. of Microsensing, VTT Inf. Technol.
Abstract :
An optimized transmission-type MEMS RF power sensor is presented. The design is based on microwave filter theory. It is shown that the thermal resolution of the sensor can be reduced below -50 dBm for RF bandwidths up to les 40 GHz
Keywords :
microsensors; microwave filters; MEMS RF power sensor; microwave filter theory; thermal resolution; wideband microwave power sensor; Bandwidth; Filtering theory; Micromechanical devices; Microwave filters; Microwave sensors; Microwave technology; Microwave theory and techniques; Radio frequency; Thermal sensors; Wideband;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 2004 Conference on
Conference_Location :
London
Print_ISBN :
0-7803-8494-6
Electronic_ISBN :
0-7803-8494-6
DOI :
10.1109/CPEM.2004.305487
