DocumentCode
3444896
Title
Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing
Author
Fernandez, Luis J. ; Visser, Eelke ; Sese, Javier ; Wiegerink, Remco ; Jansen, Henri ; Flokstra, Jaap ; Elwenspoek, Miko
Author_Institution
MESA+ Inst. for Nanotechnol., Twente Univ., Enschede
fYear
2004
fDate
38139
Firstpage
117
Lastpage
118
Abstract
The development of a novel radio frequency (RF) power sensor is presented based on capacitive micro electromechanical system (MEMS) technology, in which the signal is barely disturbed during the power measurement. Results of the first prototypes and improvements for the second generation of RF power sensors are given
Keywords
capacitive sensors; microsensors; RF power sensing; capacitive micro electromechanical system; dissipative losses; radio frequency RF power sensor; Capacitive sensors; Electromechanical sensors; Electromechanical systems; Micromechanical devices; Power generation; Power measurement; Prototypes; RF signals; Radio frequency; Sensor systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements Digest, 2004 Conference on
Conference_Location
London
Print_ISBN
0-7803-8494-6
Electronic_ISBN
0-7803-8494-6
Type
conf
DOI
10.1109/CPEM.2004.305488
Filename
4097143
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