Title :
Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing
Author :
Fernandez, Luis J. ; Visser, Eelke ; Sese, Javier ; Wiegerink, Remco ; Jansen, Henri ; Flokstra, Jaap ; Elwenspoek, Miko
Author_Institution :
MESA+ Inst. for Nanotechnol., Twente Univ., Enschede
Abstract :
The development of a novel radio frequency (RF) power sensor is presented based on capacitive micro electromechanical system (MEMS) technology, in which the signal is barely disturbed during the power measurement. Results of the first prototypes and improvements for the second generation of RF power sensors are given
Keywords :
capacitive sensors; microsensors; RF power sensing; capacitive micro electromechanical system; dissipative losses; radio frequency RF power sensor; Capacitive sensors; Electromechanical sensors; Electromechanical systems; Micromechanical devices; Power generation; Power measurement; Prototypes; RF signals; Radio frequency; Sensor systems;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 2004 Conference on
Conference_Location :
London
Print_ISBN :
0-7803-8494-6
Electronic_ISBN :
0-7803-8494-6
DOI :
10.1109/CPEM.2004.305488
