Title :
AC Voltage Reference Based on a Capacitive Micromechanical Component
Author :
Kärkkäinen, A. ; Pesonen, N. ; Suhonen, M. ; Kyynäräinen, J. ; Oja, A. ; Manninen, A. ; Tisnek, N. ; Seppä, H.
Author_Institution :
VTT Inf. Technol.
Abstract :
The design and characterization of a high stability capacitive MEMS device intended for an AC voltage reference at 100 kHz or higher frequencies is presented. Preliminary results from a first prototype device show that the pull-in voltage of the device is stable to within 10 ppm over 60 hours. We discuss an optimised device design which is expected to show greater stability
Keywords :
capacitive sensors; measurement standards; microsensors; voltage measurement; 100 kHz; 60 hours; AC voltage reference; capacitive micro electromechanical system; pull-in voltage; Capacitors; Electrodes; Microelectromechanical devices; Micromechanical devices; Packaging; Resonant frequency; Silicon on insulator technology; Springs; Stability; Voltage;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 2004 Conference on
Conference_Location :
London
Print_ISBN :
0-7803-8494-6
Electronic_ISBN :
0-7803-8494-6
DOI :
10.1109/CPEM.2004.305489
