Title :
Opto-mechanical model of surface micromachined tunable optoelectronic devices
Author :
Chien-chung Lin ; Martin, W.A. ; Harris, J.S., Jr.
Author_Institution :
Solid State & Photonics Lab., Stanford Univ., CA, USA
Abstract :
Summary form only given. Surface micromachining of deformable mirror has been widely applied in wavelength tunable optoelectronic devices. The reconfigurable structure make it very robust in wavelength division multiplexing (WDM) systems. However, changes in the reflective surface structure have not been characterized mathematically. It is also essential to combine the mechanical model to determine the deformed shape of the mirror. In this paper, we construct the first comprehensive opto-mechanical model to estimate losses and linewidth broadening of the cavity.
Keywords :
adaptive optics; micro-optics; micromachining; micromechanical resonators; mirrors; optical communication equipment; optical losses; optical tuning; spectral line broadening; wavelength division multiplexing; WDM; cavity loss estimation; deformable mirror; deformed shape; linewidth broadening; mechanical model; opto-mechanical model; reconfigurable structure; reflective surface structure; surface micromachined tunable optoelectronic devices; wavelength division multiplexing; wavelength tunable optoelectronic devices; Biomembranes; Eigenvalues and eigenfunctions; Mirrors; Optical crosstalk; Optical fiber networks; Optical resonators; Optical surface waves; Optical switches; Shape; Voltage;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO '01. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-662-1
DOI :
10.1109/CLEO.2001.947638
