Opto-mechanical model of surface micromachined tunable optoelectronic devices

Author

Chien-chung Lin ; Martin, W.A. ; Harris, J.S., Jr.

Author_Institution

Solid State & Photonics Lab., Stanford Univ., CA, USA

fYear

2001

fDate

11-11 May 2001

Firstpage

154

Lastpage

155

Abstract

Summary form only given. Surface micromachining of deformable mirror has been widely applied in wavelength tunable optoelectronic devices. The reconfigurable structure make it very robust in wavelength division multiplexing (WDM) systems. However, changes in the reflective surface structure have not been characterized mathematically. It is also essential to combine the mechanical model to determine the deformed shape of the mirror. In this paper, we construct the first comprehensive opto-mechanical model to estimate losses and linewidth broadening of the cavity.

Keywords

adaptive optics; micro-optics; micromachining; micromechanical resonators; mirrors; optical communication equipment; optical losses; optical tuning; spectral line broadening; wavelength division multiplexing; WDM; cavity loss estimation; deformable mirror; deformed shape; linewidth broadening; mechanical model; opto-mechanical model; reconfigurable structure; reflective surface structure; surface micromachined tunable optoelectronic devices; wavelength division multiplexing; wavelength tunable optoelectronic devices; Biomembranes; Eigenvalues and eigenfunctions; Mirrors; Optical crosstalk; Optical fiber networks; Optical resonators; Optical surface waves; Optical switches; Shape; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2001. CLEO '01. Technical Digest. Summaries of papers presented at the Conference on

Conference_Location

Baltimore, MD, USA

Print_ISBN

1-55752-662-1

Type

conf

DOI

10.1109/CLEO.2001.947638

Filename

947638