A Microfabricated Spring-Constant Calibration Device for Atomic Force Microscopy (AFM) Potentially Traceable to the SI

Author

Cumpson, P.J. ; Hedley, J.

Author_Institution

Centre for Opt. & Anal. Meas., National Phys. Lab., Teddington

fYear

2004

fDate

38139

Firstpage

269

Lastpage

270

Abstract

We have developed a compact and easy-to-use MEMS (micro electro-mechanical) calibration device for atomic force microscopy, using a method that allows traceability to the SI system. The new device, which we call an electrical nanobalance, is calibrated by a non-contact method, a combination of electrical measurements and Doppler velocimetry. For the AFM user, the device offers a simple, accurate and traceable method for AFM cantilever spring constant calibration, for the first time

Keywords

Doppler measurement; atomic force microscopy; calibration; micromechanical devices; Doppler velocimetry; MEMS; SI system; atomic force microscopy; electrical measurements; electrical nanobalance; microelectromechanical calibration device; microfabricated spring-constant calibration device; noncontact method; Atomic force microscopy; Atomic measurements; Calibration; Capacitance; Displacement measurement; Electric variables measurement; Electrodes; Force measurement; Optical microscopy; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Precision Electromagnetic Measurements Digest, 2004 Conference on

Conference_Location

London

Print_ISBN

0-7803-8494-6

Electronic_ISBN

0-7803-8494-6

Type

conf

DOI

10.1109/CPEM.2004.305567

Filename

4097222