Title :
A Microfabricated Spring-Constant Calibration Device for Atomic Force Microscopy (AFM) Potentially Traceable to the SI
Author :
Cumpson, P.J. ; Hedley, J.
Author_Institution :
Centre for Opt. & Anal. Meas., National Phys. Lab., Teddington
Abstract :
We have developed a compact and easy-to-use MEMS (micro electro-mechanical) calibration device for atomic force microscopy, using a method that allows traceability to the SI system. The new device, which we call an electrical nanobalance, is calibrated by a non-contact method, a combination of electrical measurements and Doppler velocimetry. For the AFM user, the device offers a simple, accurate and traceable method for AFM cantilever spring constant calibration, for the first time
Keywords :
Doppler measurement; atomic force microscopy; calibration; micromechanical devices; Doppler velocimetry; MEMS; SI system; atomic force microscopy; electrical measurements; electrical nanobalance; microelectromechanical calibration device; microfabricated spring-constant calibration device; noncontact method; Atomic force microscopy; Atomic measurements; Calibration; Capacitance; Displacement measurement; Electric variables measurement; Electrodes; Force measurement; Optical microscopy; Springs;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 2004 Conference on
Conference_Location :
London
Print_ISBN :
0-7803-8494-6
Electronic_ISBN :
0-7803-8494-6
DOI :
10.1109/CPEM.2004.305567
