Title :
NRC Quantum Hall Devices for National Measurement Institutes
Author_Institution :
Inst. for Nat. Meas. Stand., National Res. Council, Ottawa, Ont.
Abstract :
At CPEM´02 in Ottawa the NRC Electrical Standards Group undertook to fabricate a batch of Hall devices suitable for use at National Measurement Institutes as resistance standards. One wafer has been fabricated to date and testing of the electrical parameters of devices has commenced. The paper described the fabrication parameters, and preliminary test results
Keywords :
Hall effect devices; electric resistance measurement; measurement standards; NRC; National Measurement Institutes; National Research Council; quantum Hall devices; resistance standards; Annealing; Councils; Electric resistance; Electrical resistance measurement; Fabrication; Gallium arsenide; Large-scale systems; Measurement standards; Molecular beam epitaxial growth; Testing;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 2004 Conference on
Conference_Location :
London
Print_ISBN :
0-7803-8494-6
Electronic_ISBN :
0-7803-8494-6
DOI :
10.1109/CPEM.2004.305570
