Test structures for rapid prototyping of gas and pressure sensors

Author

Buehler, M.G. ; Cheng, L.-J. ; Martin, D.P.

Author_Institution

Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA

fYear

1996

fDate

20-23 Oct 1996

Firstpage

72

Lastpage

76

Abstract

A multi-project ceramic substrate was used in developing a gas sensor and pressure sensor. The ceramic substrate contained 36 chips with six variants including sensors, process control monitors, and an interconnect chip. The gas sensor is being developed as an air quality monitor and the pressure gauge as a Martian barometer. This effort was directed at mitigating reliability problems by proper material and circuit choices

Keywords

circuit noise; circuit reliability; contact resistance; gas sensors; integrated circuit interconnections; leakage currents; pressure sensors; Martian barometer; air quality monitor; gas sensors; interconnect chip; multi-project ceramic substrate; pressure sensors; process control monitors; rapid prototyping; reliability problems; test structures; Ceramics; Circuit testing; Dielectric substrates; Electrical resistance measurement; Gas detectors; Integrated circuit reliability; Process control; Prototypes; Resistors; Sensor phenomena and characterization;

fLanguage

English

Publisher

ieee

Conference_Titel

Integrated Reliability Workshop, 1996., IEEE International

Conference_Location

Lake Tahoe, CA

Print_ISBN

0-7803-3598-8

Type

conf

DOI

10.1109/IRWS.1996.583387

Filename

583387