Title :
Wafer Level Reliability application to manufacturing of high performance microprocessor
Author :
Sarma, Kanak ; Bahrami, Mahmoud ; Mistry, Kaizad
Author_Institution :
Digital Equipment Corp., Hudson, MA, USA
Abstract :
Wafer Level Reliability (WLR) application has been demonstrated in semiconductor industry during the past several years. These applications address various issues related to process technology and yield enhancements, early reliability detection, and marketing. In this work, we describe the application of WLR to the manufacturing of high performance Alpha microprocessor including designing of proper test structures that represent products and database structures for statistical analysis using appropriate business models for the successful implementation
Keywords :
computer testing; integrated circuit reliability; integrated circuit testing; integrated circuit yield; microprocessor chips; production testing; statistical analysis; Alpha microprocessor; business models; database structures; high performance microprocessor; marketing; process technology; reliability detection; statistical analysis; test structures; wafer level reliability application; yield enhancements; Antenna measurements; Circuit testing; Databases; Dielectrics; Hot carriers; Logic testing; Microprocessors; Qualifications; Semiconductor device manufacture; Virtual manufacturing;
Conference_Titel :
Integrated Reliability Workshop, 1996., IEEE International
Conference_Location :
Lake Tahoe, CA
Print_ISBN :
0-7803-3598-8
DOI :
10.1109/IRWS.1996.583388
