Title :
Discussion Group Summary Wafer-level Reliability Techniques
Author_Institution :
Sandia Technologies, Inc.
Keywords :
Dielectrics; Diodes; Monitoring; Passivation; Plasma applications; Process control; Production; Qualifications; Research and development; Standardization;
Conference_Titel :
Integrated Reliability Workshop, 1996., IEEE International
Conference_Location :
Lake Tahoe, CA, USA
Print_ISBN :
0-7803-3598-8
DOI :
10.1109/IRWS.1996.583401