Title :
Discussion Group Session Summary Thin Oxide Reliability
Author_Institution :
National Institute of Standards and Technology
Keywords :
Capacitors; Condition monitoring; Design for quality; Dielectric breakdown; Electric breakdown; Leakage current; Life testing; Manufacturing processes; Potential well; Temperature dependence;
Conference_Titel :
Integrated Reliability Workshop, 1996., IEEE International
Conference_Location :
Lake Tahoe, CA, USA
Print_ISBN :
0-7803-3598-8
DOI :
10.1109/IRWS.1996.583404
