Title :
Piezoelectric KNbO3 films for SAW device applications
Author :
Yamanouchi, Kazuhiko ; Odagawa, Hiroyuki ; Kojima, Toshiyuki ; Onoe, Atsushi ; Yoshida, Ayako ; Chikuma, Kiyofumi
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
Abstract :
KNbO3 films have been deposited on STO (SrTiO3 ) substrates using MOCVD techniques. The gas-grown films are sufficiently piezoelectric to fabricate SAW devices. The experimental results show the electromechanical coupling coefficients (K2) of 0.021 at the center frequency of 960 MHz and h/λ=0.24 (λ:SAW wavelength, h: film thickness of KNbO3). These values have fairly good agreements with theoretical ones calculated by using the piezoelectric constants of single crystals
Keywords :
MOCVD; MOCVD coatings; piezoelectric materials; piezoelectric thin films; potassium compounds; substrates; surface acoustic wave delay lines; 960 MHz; KNbO3; KNbO3 films; MOCVD techniques; SAW device; STO; SrTiO3; SrTiO3 substrates; piezoelectric constant; piezoelectric thin films; Acoustic propagation; Apertures; Frequency; Insertion loss; Metallization; Piezoelectric films; Piezoelectric polarization; Surface acoustic wave devices; Surface acoustic waves; Transducers;
Conference_Titel :
Frequency Control Symposium, 1998. Proceedings of the 1998 IEEE International
Conference_Location :
Pasadena, CA
Print_ISBN :
0-7803-4373-5
DOI :
10.1109/FREQ.1998.717987
