Design of a 2D High Precision Motion Stage

Author

Hermann, Gyula

Author_Institution

Budapest Tech, Budapest, Hungary

fYear

2009

fDate

10-12 Sept. 2009

Firstpage

1

Lastpage

6

Abstract

A small scale, high precision positioning table was developed to solve measurement problems originating from microtechnic. A construction with a single reference surface preferred and vacuum preloaded air bearing are used to enable smooth motion and eliminate stick slip. The nested tables are driven by ultrasonic piezomotors to enable submicron resolution, high speed and low health generation. The nonlinearity of the piezomotors is corrected partly by the amplifier used, and partly by the control software. Laser interferometers measure both the displacement and the angular error. Mathematical evaluation of the measuring system´s error is described and its application in the control software is presented.

Keywords

angular measurement; computerised control; displacement measurement; error analysis; motion control; multidimensional systems; position measurement; 2D high precision motion stage design; angular error measurement; control software; displacement error measurement; high precision positioning table; laser interferometer; mathematical evaluation; measurement problem solution; microtechnic; smooth motion; stick slip elimination; submicron resolution; ultrasonic piezomotor; vacuum preloaded air bearing; Coordinate measuring machines; Displacement measurement; Error correction; Gratings; Interferometers; Motion measurement; Position measurement; Probes; Ultrasonic variables measurement; Volume measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Logistics and Industrial Informatics, 2009. LINDI 2009. 2nd International

Conference_Location

Linz

Print_ISBN

978-1-4244-3958-4

Electronic_ISBN

978-1-4244-3958-4

Type

conf

DOI

10.1109/LINDI.2009.5258699

Filename

5258699