Title :
Measurement of elastic properties of thin film ZnO by resonance method
Author :
Jade, Sachin A. ; Smits, Jan G.
Author_Institution :
Boston Univ., MA, USA
Abstract :
The elastic properties of thin film ZnO have been measured by attaching a Si-ZnO strip to a ceramic bimorph, deflecting the latter with an electric signal and measuring the resonance frequencies of the Si-ZnO strip which are determined by the elastic moduli of ZnO and Si. The elastic modulus of Si is known and hence, from the resonance frequency of the beam, the elastic modulus of ZnO can be calculated. Results obtained are presented in this report
Keywords :
dielectric resonance; elastic moduli measurement; elemental semiconductors; silicon; zinc compounds; Si-ZnO; Si-ZnO strip; ceramic bimorph; elastic moduli; elastic modulus; elastic properties; electric signal; resonance frequencies; resonance frequency; resonance method; thin film ZnO; Ceramics; Electric variables measurement; Frequency measurement; Joining processes; Resonance; Resonant frequency; Semiconductor thin films; Strips; Transistors; Zinc oxide;
Conference_Titel :
Frequency Control Symposium, 1998. Proceedings of the 1998 IEEE International
Conference_Location :
Pasadena, CA
Print_ISBN :
0-7803-4373-5
DOI :
10.1109/FREQ.1998.717988
