• DocumentCode
    3448492
  • Title

    Ultra-fast laser-induced recrystallization of amorphous silicon films

  • Author

    Taeyul Choi ; Hwang, D.J. ; Hatano, M. ; Grigoropoulos, Costas P.

  • Author_Institution
    University of California
  • fYear
    2001
  • fDate
    11-11 May 2001
  • Firstpage
    231
  • Lastpage
    232
  • Abstract
    Summary form only given. The pulsed laser-induced recrystallization of thin semiconductor films on amorphous substrates can have major potential applications in the fabrication of thin film transistors (TFTs) for high definition active matrix liquid displays. For nanosecond pulses, the process is driven by rapid melting and resolidification. The associated heat transfer and phase-change thermodynamics have been studied by a variety of in situ diagnostics?? of nanosecond temporal resolution, including time-resolved optical transmission, reflection, multi-wavelength emission, and transient electrical conductance measurements.
  • Keywords
    Amorphous silicon; Chemical lasers; Laser transitions; Nonlinear optics; Optical films; Optical materials; Optical waveguides; Semiconductor films; Ultrafast optics; Waveguide lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2001. CLEO '01. Technical Digest. Summaries of papers presented at the Conference on
  • Conference_Location
    Baltimore, MD, USA
  • Print_ISBN
    1-55752-662-1
  • Type

    conf

  • DOI
    10.1109/CLEO.2001.947744
  • Filename
    947744