DocumentCode
3448492
Title
Ultra-fast laser-induced recrystallization of amorphous silicon films
Author
Taeyul Choi ; Hwang, D.J. ; Hatano, M. ; Grigoropoulos, Costas P.
Author_Institution
University of California
fYear
2001
fDate
11-11 May 2001
Firstpage
231
Lastpage
232
Abstract
Summary form only given. The pulsed laser-induced recrystallization of thin semiconductor films on amorphous substrates can have major potential applications in the fabrication of thin film transistors (TFTs) for high definition active matrix liquid displays. For nanosecond pulses, the process is driven by rapid melting and resolidification. The associated heat transfer and phase-change thermodynamics have been studied by a variety of in situ diagnostics?? of nanosecond temporal resolution, including time-resolved optical transmission, reflection, multi-wavelength emission, and transient electrical conductance measurements.
Keywords
Amorphous silicon; Chemical lasers; Laser transitions; Nonlinear optics; Optical films; Optical materials; Optical waveguides; Semiconductor films; Ultrafast optics; Waveguide lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2001. CLEO '01. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location
Baltimore, MD, USA
Print_ISBN
1-55752-662-1
Type
conf
DOI
10.1109/CLEO.2001.947744
Filename
947744
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