Analytic model of the energy distribution for energetic electrons in HiPIMS

Summary form only given. High Power Impulse Magnetron Sputtering (HiPIMS) discharges are characterized by a near-target magnetized region, where the confined electrons ionize a substantial fraction of both the gas and the sputtered neutrals. This type of discharges present an energetic electron population that is accelerated in the cathode fall region and interacts with a uniform plasma bulk where it slows down. The energetic electrons enter the plasma as a monoenergetic beam and slow down by Coulomb collisions with a Maxwellian distribution of bulk electrons, and by inelastic collisions with neutrals. We present here an analytic calculation of the energetic electrons´ distribution function. The results are verified for parameters appropriate to HiPIMS discharges, by means of numerical calculations.