Title :
Optimal extraction-a generalized least-squares approach
Author :
Tudor, Bogdan ; Steriu, Mihai-Dan
Author_Institution :
Politehnic Univ. of Bucharest, Romania
Abstract :
This paper presents an original study on the applicability of the generalized least-squares method in electron device parameter extraction. A comparison, done by using real and simulated data, proves that by applying the generalized method together with an appropriate weighting model one can obtain better parameter deviations, compared to the conventional least-squares method
Keywords :
Monte Carlo methods; least squares approximations; semiconductor device models; Monte Carlo methods; electron device parameter extraction; generalized least-squares approach; optimal extraction; parameter deviations; simulated data; weighting model; Covariance matrix; Data mining; Electron devices; Equations; Measurement errors; Measurement standards; Minimization methods; Parameter estimation; Q measurement; Shape measurement;
Conference_Titel :
Semiconductor Conference, 1995. CAS'95 Proceedings., 1995 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-2647-4
DOI :
10.1109/SMICND.1995.494866
